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Vacuum plasma treatment system 6L

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Vacuum plasma treatment system

CRF model - the VPO - MC - 6 l

Control system PLC+ touch screen

Power 380 v/AC, 50/60 hz, 12.5 kw

If power supply power of 2000W/40kHz

Capacity 235L (Option)

Number of layers 6 (Option)

Effective processing area 500 (L) *500 (W) (Option)

Two working gas channels are available: Ar, N2, CF4, O2


Product features

Large processing space, improve processing capacity, PLC+ touch screen control system, accurate control equipment operation.

Can be customized according to customer requirements cavity capacity and layer, to meet customer needs.

Low maintenance cost, convenient for customer cost control.

High precision, fast response, good handling and compatibility perfect function and professional technical support.


Range of application

Mainly used in biological and medical industry, printed circuit board industry, semiconductor IC field, silica gel, plastic, polymer field, automotive electronics industry, aviation industry and so on.


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